The pursuit started at Monterey Boulevard and went north on Highway 101 before the suspects got off the freeway.
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San Francisco police canvased the area around Delancey and Brannan Streets and detained three suspects.
Police had asked the public to avoid the area near Brannan Street near the Embarcadero.
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Video: SFPD arrests suspect after Highway 101 chase
1 armed robbery suspect in custody, search underway for others after chase in SF