The pursuit started at Monterey Boulevard and went north on Highway 101 before the suspects got off the freeway.
San Francisco police canvased the area around Delancey and Brannan Streets and detained three suspects.
Police had asked the public to avoid the area near Brannan Street near the Embarcadero.
Video: SFPD arrests suspect after Highway 101 chase
1 armed robbery suspect in custody, search underway for others after chase in SF